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ESMF005 Mini gas mass flow meters for Oxygen Nitrogen Carbon

The ESMF005 miniature thermal gas mass flow meter is based on the law of thermal diffusion and King’s law. It uses MEMS microelectromechanical technology to integrate a sensitive chip, with a core composed of a micro heating element and symmetrically arranged temperature probes, allowing direct measurement of gas mass flow without temperature and pressure compensation. When operating, it works in either constant temperature difference or constant power mode, utilizing the heat dissipation effect as gas flows over the heating element. The rate of heat loss is converted into an electrical signal, which after signal conditioning outputs standard data, with a response speed reaching the millisecond level. This flow meter is compact, low-power, with a compact structure and low pressure loss, featuring high accuracy, high stability, and strong anti-interference capability. It can measure very low flow rates with a resolution of up to 0.01 m/s. The product has a fully sealed design and adapts to various complex environments. It is widely used in semiconductor manufacturing, medical respiratory equipment, environmental monitoring, industrial process control, and scientific research, accurately monitoring the flow of process gases, medical gases, exhaust gases, and other clean gases, providing reliable data support for equipment operation and process optimization.

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    product details

    Working Principle

    The MEMS sensor consists of two patch platinum resistors, one measuring the temperature of the gas in the pipe and the other heated by an electric current, keeping the temperature difference between the two thermal resistors constant. As the gas flows through the thermal resistance, there is a cooling effect. As the flow rate increases, the cooling effect increases and the sensor power required to keep the temperature difference between the two thermal resistors constant increases.The power added to the heating resistance is proportional to the mass flow rate

     product  features

    1. Advanced Core Technology: Uses MEMS micro-electromechanical integration process, integrating the heating element and temperature probe into a microchip. It operates based on the laws of thermal diffusion and King’s law, without requiring additional temperature and pressure compensation modules, allowing direct and precise measurement of gas mass flow and avoiding the errors of indirect measurement.

    2. Compact and Low Power Consumption: The overall structure is compact, with a volume much smaller than traditional flow meters, suitable for tight installation spaces; extremely low power consumption, widely applicable to portable devices and battery-powered scenarios, providing energy-efficient long-term operation.

    3. Excellent Measurement Performance: High accuracy and strong resolution, able to precisely capture small flow variations (resolution up to 0.01 m/s); fast response speed (millisecond level), capable of real-time flow fluctuation tracking, with minimal lag and outstanding stability.

    4. Convenient and Durable: Minimal pressure loss, does not affect gas delivery efficiency; fully sealed design, resistant to dust and moisture, adaptable to various complex industrial and laboratory environments; easy installation, no complex debugging required, and low maintenance costs.

    5. Wide Compatibility: Can measure various clean gases, compatible with process gases, medical gases, exhaust gases, etc., suitable for flow monitoring needs in semiconductor, medical, environmental protection, industrial control, research, and other fields, offering strong versatility.

    Product detail

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