Wide range Miniature Digital Thermal Gas Mass Flow meter for MEMS Sensors Instrument
Working Principle
The MEMS sensor consists of two patch platinum resistors, one measuring the temperature of the gas in the pipe and the other heated by an electric current, keeping the temperature difference between the two thermal resistors constant. As the gas flows through the thermal resistance, there is a cooling effect. As the flow rate increases, the cooling effect increases and the sensor power required to keep the temperature difference between the two thermal resistors constant increases.The power added to the heating resistance is proportional to the mass flow rate
Product Features
1.MEMS sensor, fast response;
2.Stable zero point, high precision and good repeatability;
3.Wide range ratio, selectable flow range;
4.Forward flow and reverse flow can be displayed;
5.Multiple signal outputs available;
6.Standard mechanical interface optional;
Product detail
PRODUCT SPECIFICATIONS
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Measurement accuracy |
The flow rate is less than 100NL/min |
Plus or minus (1.0 +0.4 FS) % |
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Flow rate greater than 100NL/min |
Plus or minus (1.5 +0.2 FS) % |
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Working power supply |
DC24V/100mA |
Preheating time |
3 to 4 minutes |
|
Response time |
50ms |
Output mode |
4-20mA\RS485 |
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Zero drift |
±20mV |
Display format |
Instantaneous flow,cumulative flow |
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Working temperature |
-10~55℃ |
Operating humidity |
<95%RH(no frost, no ice) |
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Storage temperature |
-10~65℃ |
Mode of communication |
RS485(Modbus RTU protocol) |
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Working pressure |
≤1.0MPa |
Calibration medium |
Air (25 °C, 101.325kPa） |
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Thermal mass flow meter |
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Model |
Pipe diameter |
Flow range |
medium |
pressure |
output |
interface |
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ESMF004-08-100L |
DN8 |
1-100NmL/min |
gas |
≤1.0MPA |
4-20mA/RS485 |
G1/4 |
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ESMF004-10-1000mL |
DN8 |
10-1000NmL/min |
G1/4 |
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ESMF004-15-100L |
DN15 |
1-100NL/min |
BSPT1/2 |
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ESMF004-20-500L |
DN15 |
5-500NL/min |
BSPT1/2 |
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ESMF004-25-1000L |
DN20 |
10-1000NL/min |
BSPT3/4 |
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